High-Performance Aluminum Nitride Gold-Plated Substrate for Power Lasers and Optical Communication

항목	단위	Si3N4	AlN	ZTA	BeO
밀도	g/m³	3.2	3.3	4	3
Thermal Conductivity	W/m.K@25℃	≥80	≥170	≥27	≥250
Coefficient of Thermal Expansion	X10-6/K（20℃-300℃）	≤2.6	≤4.3	≤7.5	≤9
Flexural Strength	MPa	≥700	≥450	≥500	≥190
Dielectric Strength	KV/mm	≥15
Dielectric Loss	1MHz	0.0003
Dielectric Constant	1MHz	9	10.5	6.9
Volume Resistivity	Ω·cm@ 20 °C	10(14)
Young’s Modulus	Gpa	320	310	/

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